Experimental studies and computer simulation of the preparation of nanoporous silicon-carbide membranes by chemical-vapor infiltration/chemical-vapor deposition techniques

Chemical Engineering Science

Volumn 63, Issue 6, 2008, Pages 1460-1470

  Chen, Feng ^a   Mourhatch, Rayan ^a   Tsotsis, Theodore T ^a   Sahimi, Muhammad ^a  

^a University of Southern California ^*  (United States)

Author keywords

Chemical vapor deposition; Chemical vapor infiltration; Hindered diffusion; Knudsen diffusion; Nanoporous membranes; Numerical simulation

Indexed keywords

COMPUTER SIMULATION; FUNCTION EVALUATION; INFILTRATION; MECHANICAL PERMEABILITY;

HINDERED DIFFUSION; KNUDSEN DIFFUSION; NANOPOROUS MEMBRANES;

CHEMICAL VAPOR DEPOSITION;

CHEMICAL VAPOR DEPOSITION; COMPUTER SIMULATION; FUNCTION EVALUATION; INFILTRATION; MECHANICAL PERMEABILITY;

EID: 38949117532     PISSN: 00092509     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ces.2007.12.001     Document Type: Article

References (28)

1. Beyne A.O.E., and Froment G.F. The effect of pore blockage on the diffusivity in ZSM5: a percolation approach. Chemical Engineering Journal 82 (2001) 281
2. Birakayala N., and Evans E.A. A reduced reaction model for carbon CVD/CVI processes. Carbon 40 (2002) 675
3. Bird R.B., Stewart W.E., and Lightfoot E.N. Transport Phenomena. second revised ed (2007), Wiley, New York
4. Boo J.H., Lee S.B., Yu K.S., Sung M.M., and Kim Y. High vacuum chemical vapor deposition of cubic SiC thin films on Si(0 0 1) substrates using single source precursor. Surface and Coating Technology 131 (2000) 147
5. Brenner H., and Gaydos L.J. The constrained Brownian movement of spherical particles in cylindrical pores of comparable radius. Journal of Colloids and Interface Science 58 (1977) 312
6. Brinkman H.W., Cao G.Z., Meijerink J., de Vries K.J., and Burggraaf A.J. Modelling and analysis of CVD processes for ceramic membrane preparation. Solid State Ionics 63-65 (1993) 37
7. Chang H.-C., Morse T.F., and Sheldon B.W. Minimizing infiltration times during isothermal chemical vapor infiltration with methyltrichlorosilane. Journal of the American Ceramic Society 80 (1997) 1805
8. Chen, F., Mourhatch, R., Tsotsis, T.T., Sahimi, M., 2007. Pore network model of transport and separation of binary gas mixtures in nanoporous membranes. Journal of Membrane Science, submitted for publication.
9. Ciora R.J., Fayyaz B., Liu P.K.T., Suwanmethanond V., Mallada R., Sahimi M., and Tsotsis T.T. Preparation and reactive applications of nanoporous silicon carbide membranes. Chemical Engineering Science 59 (2004) 4957
10. Dollet A. Multiscale modeling of CVD film growth-a review of recent works. Surface and Coating Technology 245 (2004) 177-178
11. Elyassi B., Sahimi M., and Tsotsis T.T. Silicon carbide membranes for gas separation applications. Journal of Membrane Science 288 (2007) 290
12. Elyassi, B., Sahimi, M., Tsotsis, T.T., 2007b. A novel sacrificial interlayer-based method for the preparation of silicon carbide membranes. Journal of Membrane Science, in press.
13. Finlayson B.A. Nonlinear Analysis in Chemical Engineering (1980), McGraw-Hill, New York
14. Jensen K.F., Einset E.O., and Fotiadis D.I. Flow phenomena in chemical vapor deposition of thin films. Annual Reviews of Fluid Mechanics 23 (1991) 197
15. Komiyama H., Shimogaki Y., and Egashira Y. Chemical reaction engineering in the design of CVD reactors. Chemical Engineering Science 54 (1999) 1941
16. Kusakabe K., Yokoyama S., Morooka S., Hayashi J., and Nagata H. Development of supported thin palladium membrane and application to enhancement of propane aromatization on Ga-silicate catalyst. Chemical Engineering Science 51 (1996) 3027
17. Lin Y.S., and Burggraaf A.J. Modeling and analysis of CVD processes in porous media for ceramic composite preparation. Chemical Engineering Science 46 (1991) 3067
18. Lin Y.S., and Burggraaf A.J. CVD of solid oxides in porous substrates for ceramic membrane modification. A.I.Ch.E. Journal 38 (1992) 445
19. Pappenheimer J.R., Renkin E.M., and Barrero L.M. Filtration, diffusion, and molecular sieving through peripheral capillary membranes pores. American Journal of Physiology 67 (1951) 13
20. + reactive ion scattering and secondary ion mass spectrometry. Surface Science 450 (2000) 117
21. Renkin E.M. Filtration diffusion and molecular sieving through porous cellulose membranes. Journal of General Physiology 38 (1954) 225
22. Sanchez J., and Tsotsis T.T. Catalytic Membranes and Membrane Reactors (2002), Wiley-VCH, Berlin
23. Sea B.-K., Ando K., Kusakabe K., and Morooka S. Separation of hydrogen from steam using a SiC-based membrane formed by chemical vapor deposition of triisopropylsilane. Journal of Membrane Science 146 (1998) 73
24. Suwanmethanond V., Goo E., Liu P.K.T., Johnston G., Sahimi M., and Tsotsis T.T. Porous silicon carbide sintered substrates for high-temperature membrane. Industrial and Engineering Chemistry Research 39 (2000) 3264
25. 3 using alternative-supply CVI method. Journal of the Ceramic Society of Japan 109 (2001) 305
26. 3. A.I.Ch.E. Journal 38 (1992) 847
27. Valente G., Wijesundara M.B.J., Maboudian R., and Carraro C. Single-source CVD of 3C-SiC films in a LPCVD reactor: reactor modeling and chemical kinetics. Journal of Electrochemical Society 151 (2004) C215
28. Yamaguchi T., Ying X., Tokimasa Y., Nair B.N., Sugawara T., and Nakao S.-I. Reaction control of tetraethyl orthosilicate (TEOS) and tetramethyl orthosilicate (TMOS) counter diffusion chemical vapour deposition for preparation of molecular-sieve membranes. Physical Chemistry Chemical Physics 2 (2000) 4465