Heat transfer in vacuum packaged microelectromechanical system devices

Physics of Fluids

Volumn 20, Issue 1, 2008, Pages

  Cai, Chunpei ^a  

^a ZONA TECHNOLOGY INC   (United States)

Author keywords

Heat transfer; Micromechanical devices; Thermal management (packaging)

Indexed keywords

BOUNDARY CONDITIONS; FLOW OF GASES; LAPLACE EQUATION; MEMS; MONTE CARLO METHODS; NAVIER STOKES EQUATIONS; STEADY FLOW;

CONTINUUM FLOW; ENERGY EQUATION; INTERNAL FLOW;

HEAT TRANSFER;

BOUNDARY CONDITIONS; FLOW OF GASES; HEAT TRANSFER; LAPLACE EQUATION; MEMS; MONTE CARLO METHODS; NAVIER STOKES EQUATIONS; STEADY FLOW;

EID: 38949104348     PISSN: 10706631     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2832777     Document Type: Article

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