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Volumn 45, Issue 1, 2008, Pages 46-52

The use of diaphragm bellows to construct a constant pressure gas flowmeter for the flow rate range 10-7 Pa m3 s-1 to 10-1 Pa m3 s-1

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTATIONAL GEOMETRY; DEGASSING; ELASTOMERS; FLOW RATE; NONLINEAR ANALYSIS; PRESSURE CONTROL; TEMPERATURE CONTROL; UNCERTAINTY ANALYSIS;

EID: 38949097415     PISSN: 00261394     EISSN: 16817575     Source Type: Journal    
DOI: 10.1088/0026-1394/45/1/007     Document Type: Article
Times cited : (16)

References (14)
  • 4
    • 0039337157 scopus 로고
    • Stepped linear piston displacement fundamental leak calibration system
    • Thornberg S M 1988 Stepped linear piston displacement fundamental leak calibration system J. Vac. Sci. Technol. A 6 2522-7
    • (1988) J. Vac. Sci. Technol. , vol.6 , Issue.4 , pp. 2522-2527
    • Thornberg, S.M.1
  • 6
    • 0029358143 scopus 로고
    • Convenient primary gas flow meter
    • Jitschin W, Weber U and Hartmann H K 1995 Convenient primary gas flow meter Vacuum 46 821-4
    • (1995) Vacuum , vol.46 , Issue.8-10 , pp. 821-824
    • Jitschin, W.1    Weber, U.2    Hartmann, H.K.3
  • 7
    • 0009356902 scopus 로고    scopus 로고
    • Funadamental leak calibration system for gas leaks with a defined pressure difference over the leak element
    • Wälchli U, Stöckli A L, Rapp F, Bösch M A and Schmid A 1996 Funadamental leak calibration system for gas leaks with a defined pressure difference over the leak element J. Vac. Sci. Technol. A 14 1247-51
    • (1996) J. Vac. Sci. Technol. , vol.14 , Issue.3 , pp. 1247-1251
    • Wälchli, U.1    Stöckli, A.L.2    Rapp, F.3    Bösch, M.A.4    Schmid, A.5
  • 10
    • 0027541637 scopus 로고
    • A precision gas flowmeter for vacuum metrology
    • Jousten K, Messer G and Wandrey D 1993 A precision gas flowmeter for vacuum metrology Vacuum 44 135-41
    • (1993) Vacuum , vol.44 , Issue.2 , pp. 135-141
    • Jousten, K.1    Messer, G.2    Wandrey, D.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.