Fundamental leak calibration system for gas leaks with a defined pressure difference over the leak element

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 3, 1996, Pages 1247-1251

  Walchli U ^a   Stockli A L ^a   Rapp, F ^a   Bosch M A ^a   Schmid, A ^a  

^a Balzers Limited   (Liechtenstein)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0009356902     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579936     Document Type: Article

References (8)

1. C. D. Ehrlich and J. A. Basford, J. Vac. Sci. Technol. A 10, 1 (1992).
2. J. Ball, J. Vac. Sci. Technol. A 6, 2860 (1988).
3. J. A. Basford, J. Vac. Sci. Technol. A 9, 3153 (1991).
4. M. V. Inverson and J. L. Hartley, J. Vac. Sci. Technol. 20, 982 (1982).
5. S. M. Thomberg, J. Vac. Sci. Technol. A 6, 2522 (1988).
6. K. E. McCulloh, C. R. Tilford, C. D. Ehrlich, and F. G. Long, J. Vac. Sci. Technol. A 5, 376 (1987).
7. DIN28417, Beuth Verlag GmbH, Berlin, 1976 (in German).
8. CEN European Committee for Standardization, TC 138 WG/6 n31 rev. 3, 12.1.95.