A promising thermal pressing used in fabricating microlens array

International Journal of Advanced Manufacturing Technology

Volumn 36, Issue 1-2, 2008, Pages 53-59

  Shyu, Ruey Fang ^a   Yang, Hsiharng ^b  

^a NATIONAL FORMOSA UNIVERSITY   (Taiwan)

^b NATIONAL CHUNG HSING UNIVERSITY   (Taiwan)

Author keywords

Micromolding; Polygon microlens array; Thermal pressing

Indexed keywords

ATOMIC FORCE MICROSCOPY; ELECTROFORMING; LITHOGRAPHY; MICROARRAYS; PHOTOMASKS; POLYCARBONATES;

MICROMOLDING; PHOTORESIST PATTERNING; POLYGON MICROLENS ARRAY; THERMAL PRESSING;

MICROLENSES;

LITHOGRAPHY; POLYCARBONATES;

EID: 38949096865     PISSN: 02683768     EISSN: 14333015     Source Type: Journal    
DOI: 10.1007/s00170-006-0812-z     Document Type: Article

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