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Volumn 532-533, Issue , 2006, Pages 221-224
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Fabrication of microelectrode by current density control in electrochemical micromachining
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Author keywords
Current density control; EMM; High frequency short pulses; Microelectrode
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Indexed keywords
CURRENT DENSITY;
ELECTROCHEMICAL CUTTING;
FABRICATION;
MICROELECTRODES;
SCANNING PROBE MICROSCOPY;
CATHODE AND ANODE;
DENSITY CONTROL FUNCTION;
ELECTROCHEMICAL MACHINING;
ELECTROCHEMICAL MICROMACHINING;
FABRICATION TECHNOLOGIES;
MACHINING ACCURACY;
POTENTIAL CAPABILITY;
SHORT PULSE;
MICROMACHINING;
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EID: 38949094312
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/0-87849-421-9.221 Document Type: Conference Paper |
Times cited : (4)
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References (5)
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