Electrochemistry and microsystems

Electrochimica Acta

Volumn 48, Issue 20-22, 2003, Pages 2857-2868

  Ehrfeld, Wolfgang ^a  

^a Ehrfeld Mikrotechnik AG   (Germany)

Author keywords

Electrochemical micromachining; Lab on a chip; LIGA; Microfluidics; Microsystems

Indexed keywords

ANODIC OXIDATION; ELECTRODES; ELECTROOSMOSIS; ELECTROPHORESIS; ETCHING; MICROELECTRONICS; MICROSTRUCTURE;

MICROFLUIDICS;

ELECTROCHEMISTRY;

EID: 0042469314     PISSN: 00134686     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0013-4686(03)00350-5     Document Type: Conference Paper

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