Fabrication of single-crystalline LiTaO3 film on silicon substrate using thin film transfer technology

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 26, Issue 1, 2008, Pages 206-208

  Liu, Weili ^a   Zhan, Da ^b   Ma, Xiaobo ^b   Song, Zhitang ^a   Feng, Songlin ^a  

^a SHANGHAI INSTITUTE OF MICROSYSTEM AND INFORMATION TECHNOLOGY   (China)

^b NONE

Author keywords

[No Author keywords available]

Indexed keywords

LITHIUM COMPOUNDS; LITHOGRAPHY; SILICON; SINGLE CRYSTALS; TRANSMISSION ELECTRON MICROSCOPY;

HYDROGEN IMPLANTATION; LAYER-TRANSFER TECHNOLOGY; STRUCTURAL QUALITY; WAFER-BONDING;

THIN FILMS;

EID: 38849133666     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2830691     Document Type: Article

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