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Volumn 147, Issue 2-3, 2008, Pages 195-199
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Optimization of the luminescence emission of Si nanocrystals synthesized from non-stoichiometric Si oxides using a Central Composite Design of the deposition process
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Author keywords
Cathodoluminescence; Face Centered Central Composite Design; FTIR spectroscopy; Non stoichiometric Si oxides; Si nanocrystals; Spectroscopic ellipsometry
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Indexed keywords
CATHODOLUMINESCENCE;
FOURIER TRANSFORM INFRARED SPECTROSCOPY;
LUMINESCENCE;
OXIDE FILMS;
SEMICONDUCTING SILICON;
SPECTROSCOPIC ELLIPSOMETRY;
FACE CENTERED CENTRAL COMPOSITE DESIGN;
FORMING GAS;
NANOCRYSTALS;
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EID: 38749122485
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mseb.2007.08.015 Document Type: Article |
Times cited : (5)
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References (11)
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