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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 20, Issue 4, 2002, Pages 1368-1378

Structure and photoluminescence features of nanocrystalline Si/SiO2 films produced by plasma chemical vapor deposition and post-treatment

(5) Wu, Xiaochun a Ossadnik, Ch a Eggs, Ch a Veprek, S a Phillipp, F b

a TECHNICAL UNIVERSITY OF MUNICH (Germany)

b MAX PLANCK INSTITUTE FOR INTELLIGENT SYSTEMS (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; COMPOSITION; CRYSTAL STRUCTURE; HIGH TEMPERATURE EFFECTS; KINETIC THEORY; MORPHOLOGY; NANOSTRUCTURED MATERIALS; PHOTOLUMINESCENCE; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SILICA; SILICON; SYNTHESIS (CHEMICAL);

KINETIC OSCILLATION; POST TREATMENT; THERMAL DONOR LIKE DEFECT STATES;

OPTICAL FILMS;

EID: 0035982542 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1490389 Document Type: Conference Paper

Times cited : (24)

References (62)

1
- 0141775174
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1046
- Canham, L.T.¹

2
- 0040326086
- (1995) Phys. Rep. , vol.263 , pp. 1
- Kanemitsu, Y.¹

3
- 0001753504
- (1997) J. Appl. Phys. , vol.82 , pp. 909
- Cullis, A.G.¹ Canham, L.T.² Calcott, P.D.J.³

4
- 4043113976
- (1993) J. Phys.: Condens. Matter , vol.5
- Calcot, P.D.G.¹ Nash, K.J.² Canham, L.T.³ Kane, M.J.⁴ Brumhead, D.⁵

5
- 0027699024
- (1993) J. Lumin. , vol.57 , pp. 257
- Calcot, P.D.G.¹ Nash, K.J.² Canham, L.T.³ Kane, M.J.⁴ Brumhead, D.⁵

6
- 0000263668
- (1995) Phys. Rev. B , vol.51 , pp. 17698
- Nash, K.J.¹ Calcott, P.D.J.² Canham, L.T.³ Needs, R.J.⁴

7
- 0026205766
- (1991) Surf. Sci. , vol.254 , pp. 195
- Bsiesy, A.¹

8
- 0026678237
- (1992) Solid State Commun. , vol.81 , pp. 307
- Brant, S.M.¹ Fuchs, D.H.² Stutzmann, M.³ Weber, J.⁴ Cardona, M.⁵

9
- 0000317389
- (1992) Phys. Rev. B , vol.45 , pp. 13788
- Prokes, S.M.¹ Glembocki, J.U.² Bermudez, U.M.³ Kaplan, R.⁴ Friedersdorf, E.L.⁵ Searon, C.P.⁶

10
- 0040104778
- (1992) Appl. Phys. Lett. , vol.60 , pp. 1700
- Tsai, C.¹ Li, H.K.² Kinosky, S.D.³ Qian, Z.R.⁴ Hsu, C.T.⁵ Irby, T.J.⁶ Banerjee, S.K.⁷ Hance, K.B.⁸ White, M.J.⁹

11
- 0027836204
- (1993) Mater. Res. Soc. Symp. Proc. , vol.298 , pp. 117
- Veprek, S.¹ Rückschloss, M.² Landkammer, B.³ Ambacher, O.⁴

12
- 0027152627
- MRS Symposia Proceedings, Pittsburgh, PA, 1993 , pp. 197
- Koch, F.¹ Petrova-Koch, V.² Muschik, T.³ Nikolov, A.⁴

13
- 0009244602
- (1993) Appl. Phys. Lett. , vol.62 , pp. 3244
- Prokes, S.M.¹

14
- 0031648032
- (1998) J. Phys. Chem. B , vol.102 , pp. 33
- Gole, L.J.¹ Dixon, A.D.²

15
- 0542408708
- (1997) Phys. Rev. B , vol.56 , pp. 2137
- Gole, L.J.¹ Dudel, P.F.² Grantier, D.³ Dixon, A.D.⁴

16
- 0031561307
- (1997) J. Phys. Chem. B , vol.101 , pp. 8098
- Gole, J.L.¹ Dixon, D.A.²

17
- 0000607483
- (1998) J. Phys. Chem. B , vol.102 , pp. 1768
- Gole, J.L.¹ Dixon, A.D.²

18
- 0008813837
- (1999) Phys. Rev. Lett. , vol.82 , pp. 197
- Wolkin, M.V.¹ Jorne, J.² Fauchet, P.M.³ Allan, G.⁴ Delerue, C.⁵

19
- 0001247434
- (2000) Appl. Phys. Lett. , vol.77 , pp. 498
- Coulthard, I.¹ Antel, W.J.² Freeland, J.W.³ Sham, T.K.⁴ Naftel, S.J.⁵ Zhang, P.⁶

20
- 4243433320
- (1999) Phys. Rev. B , vol.60 , pp. 15538
- Porteanu, H.E.¹ Lifshitz, E.² Dittrich, Th.³ Petrova-Koch, V.⁴

21
- 0001505108
- (1999) Phys. Rev. B , vol.59 , pp. 5026
- Wang, J.P.¹ Song, L.² Zou, B.S.³ El-Sayed, M.A.⁴

22
- 0030086959
- (1996) J. Mater. Res. , vol.11 , pp. 305
- Prokes, S.M.¹

23
- 0027701756
- (1993) J. Lumin. , vol.57 , pp. 271
- Koch, F.¹ Petrova-Koch, V.² Muschik, T.³

24
- 0005263837
- (1991) Solid State Phys. , vol.27 , pp. 875
- Takagi, H.¹ Mitome, M.² Yano, R.³ Nakagi, T.⁴

25
- 35949006582
- (1993) Phys. Rev. B , vol.48 , pp. 4883
- Kanemitsu, Y.¹ Ogawa, T.² Shiraishi, K.³ Takeda, K.⁴

26
- 33646611558
- (1991) Appl. Phys. Lett. , vol.59 , pp. 3168
- Maeda, Y.¹ Tsukamoto, N.² Yazawa, Y.³ Kanemitsu, Y.⁴ Masumoto, Y.⁵

27
- 0029231923
- (1995) Thin Solid Films , vol.255 , pp. 103
- Ludwig, M.H.¹ Hummel, E.E.² Stora, M.³

28
- 0027698857
- (1993) J. Lumin. , vol.57 , pp. 1
- Rückschloss, M.¹ Landkammer, B.² Ambacher, O.³ Veprek, S.⁴

29
- 0005374458
- (1993) Appl. Phys. Lett. , vol.63 , pp. 11
- Rückschloss, M.¹ Landkammer, B.² Veprek, S.³

30
- 0027150022
- (1993) Mater. Res. Soc. Symp. Proc. , vol.283 , pp. 65
- Rückschloss, M.¹ Landkammer, B.² Ambacher, O.³ Veprek, S.⁴

31
- 0029747841
- (1996) Mater. Res. Soc. Symp. Proc. , vol.405 , pp. 141
- Veprek, S.¹ Wirshiem, T.² Rückschloss, M.³ Ossadnik, Ch.⁴ Dian, J.⁵ Perna, S.⁶ Gregora, I.⁷

32
- 0028407103
- (1994) Phys. Rev. Lett. , vol.72 , pp. 2648
- Schuppler, S.¹

33
- 0030392147
- (1996) Appl. Phys. Lett. , vol.69 , pp. 3779
- Mizuno, H.¹ Koyama, H.² Koshida, N.³

34
- 21544478900
- (1990) Appl. Phys. Lett. , vol.24 , pp. 2379
- Takagi, H.¹ Ogawa, H.² Yamazaki, Y.³ Ishizaki, A.⁴ Nakagiri, T.⁵

35
- 0026763707
- (1992) Jpn. J. Appl. Phys., Part 2 , vol.31
- Ito, T.¹ Ohta, T.² Hiraki, A.³

36
- 0000593550
- (1998) Appl. Phys. Lett. , vol.72 , pp. 2577
- Brongersma, M.L.¹ Polman, A.² Min, K.S.³ Boer, E.⁴ Tambo, T.⁵ Atwater, H.A.⁶

37
- 0242679880
- (Chemical Rubber Corp., Boca Raton, FL)
- (1997) Handbook of Optical Properties , pp. 129
- Veprek, S.¹ Wirschem, T.²

38
- 0000075376
- (1999) Phys. Rev. B , vol.58 , pp. 15632
- Prokes, S.M.¹ Carlos, W.E.² Veprek, S.³ Ossadnik, Ch.⁴

39
- 0005264654
- (unpublished)
- Wu, X.C.¹ Bek, A.² Bittner, A.³ Kern, K.⁴ Ossadnik, Ch.⁵ Eggs, Ch.⁶ Veprek, S.⁷

40
- 0019927631
- (1982) Philos. Mag. B , vol.45 , pp. 137
- Veprek, S.¹ Iqbal, Z.² Sarott, F.A.³

41
- 0023312755
- (1987) Philos. Mag. B , vol.55 , pp. 377
- Konuma, M.¹ Curtins, H.² Sarott, F.A.³ Veprek, S.⁴

42
- 0000642321
- (1994) Phys. Rev. B , vol.49 , pp. 14732
- Kanemitsu, Y.¹ Futagi, T.² Matsumoto, T.³ Mimura, H.⁴

43
- 0029221964
- (1995) Thin Solid Films , vol.255 , pp. 219
- Hummel, R.E.¹ Ludwig, M.² Chang, S.S.³ LaTorre, G.⁴

44
- 0031075604
- (1997) J. Phys. Chem. B , vol.101 , pp. 1202
- Mawhinney, D.B.¹ Glass J.A., Jr.² Yates, J.T.³

45
- 36449004558
- (1995) Appl. Phys. Lett. , vol.67 , pp. 2370
- Delly, B.¹ Steigmeier, E.F.²

46
- 0001651260
- (1993) Phys. Rev. B , vol.47 , pp. 1397
- Delly, B.¹ Steigmeier, E.F.²

47
- 0028767142
- (1994) Phys. Rev. Lett. , vol.72 , pp. 1514
- Hybertsen, M.S.¹

48
- 26144466975
- (1992) Phys. Rev. B , vol.46 , pp. 15578
- Takagahara, T.¹ Takeda, K.²

49
- 4243209194
- (1993) Phys. Rev. B , vol.48 , pp. 11024
- Delerue, C.¹ Allan, G.² Lannoo, M.³

50
- 0001622164
- (2000) Appl. Phys. Lett. , vol.77 , pp. 645
- Wu, X.C.¹ Bittner, A.M.² Kern, K.³ Eggs, Ch.⁴ Veprek, S.⁵

51
- 0005944794
- (1992) J. Appl. Phys. , vol.71 , pp. 2403
- Xie, H.Y.¹ Wilson, L.W.² Ross, M.F.³ Mucha, A.J.⁴ Fitzgerald, A.E.⁵ Macaulay, M.J.⁶ Harris, D.T.⁷

52
- 0027704274
- (1993) J. Appl. Phys. , vol.74 , pp. 6375
- Ookubo, N.¹

53
- 0000891857
- (1994) J. Appl. Phys. , vol.75 , pp. 2727
- Bondarenko, P.V.¹ Borisenko, E.V.² Dorofeev, M.A.³ Germanenko, N.I.⁴ Gaponenko, V.S.⁵

54
- 0000586408
- (1994) Phys. Rev. B , vol.49 , pp. 5706
- Sinha, S.¹ Banerjee, S.² Arora, M.B.³

55
- 0000702163
- (1995) Phys. Rev. B , vol.51 , pp. 17535
- Kux, A.¹ Ben Chorin, M.²

56
- 0000203518
- (1996) Phys. Rev. B , vol.53 , pp. 15643
- Andersen, K.O.¹ Veje, E.²

57
- 0000102728
- (1990) Phys. Rev. B , vol.41 , pp. 12628
- Gregorkiewicz, T.¹ Bekman, H.H.P.Th.² Ammerlaan, C.A.J.³

58
- 0001654452
- (1987) Phys. Rev. B , vol.35 , pp. 3810
- Gregorkiewicz, T.¹ Van Wezep, D.A.² Bekman, H.H.P.Th.³ Ammerlaan, C.A.J.⁴

59
- 77956999508
- (Academic, New York)
- (1984) Semiconductors and Semimetals , vol.42 , pp. 251
- Michel, J.¹ Kimerling, C.L.²

60
- 0001315936
- (1994) Phys. Rev. B , vol.49 , pp. 2238
- Prokes, S.M.¹ Glembocki, O.J.²

61
- 0000828484
- (1994) Phys. Rev. B , vol.50 , pp. 17093
- Prokes, S.M.¹ Carlos, W.E.² Glembocki, O.J.³

62
- 3342917197
- (1990) J. Appl. Phys. , vol.68 , pp. 1212
- Munekuni, S.¹ Yamanaka, T.² Shimogaichi, Y.³ Tohman, R.⁴ Ohni, Y.⁵ Nagasawa, K.⁶ Hama, Y.⁷

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