Controlling Ta phase in Ta/TaN bilayer by surface pre-treatment on TaN

Journal of Physics and Chemistry of Solids

Volumn 69, Issue 2-3, 2008, Pages 501-504

  Tsao, Jung Chih ^a   Liu, Chuan Pu ^a   Wang, Ying Lang ^b,c   Wang, Yu Sheng ^a   Chen, Ke Wei ^b,c  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

^b NATIONAL CHIAYI UNIVERSITY   (Taiwan)

^c NATIONAL UNIVERSITY OF TAINAN   (Taiwan)

Author keywords

A. Electronic materials; A. Semiconductor; A. Thin film; D. Electrical properties

Indexed keywords

ELECTRIC PROPERTIES; SEMICONDUCTOR MATERIALS; SURFACE TREATMENT;

ELECTRONIC MATERIALS; MULTILEVEL INTERCONNECTIONS;

TANTALUM COMPOUNDS;

EID: 38749099043     PISSN: 00223697     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jpcs.2007.11.022     Document Type: Article

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