SCOPUS 정보 검색 플랫폼

Volumn 15, Issue 3, 2007, Pages 253-258

SIMS depth profiling of thin nitride- and carbide-based films for hard coating

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION; HARD COATINGS; IMPURITIES; MULTILAYERS; SECONDARY ION MASS SPECTROMETRY; THIN FILMS;

ION MASS INTERFERENCE; LOW ENERGY BEAM SPUTTERING; MATRIX EFFECTS; OXYGEN INFLUENCE;

DEPTH PROFILING;

EID: 38549161221 PISSN: 16065131 EISSN: None Source Type: Journal
DOI: None Document Type: Conference Paper

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.