AFM investigations of chemical-mechanical processes on silicon(100) surfaces

Materials Research Society Symposium Proceedings

Volumn 991, Issue , 2007, Pages 93-105

  Imoto, Ruiji ^a   Stevens, Forrest ^a   Langford, Steven ^a   Dickinson, Tom ^a  

^a WASHINGTON STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BASIC SOLUTION; CHEMICAL EFFECTS; TRIBOCHEMICAL MECHANISM;

ATOMIC FORCE MICROSCOPY; ETCHING; SILICON; SURFACE ROUGHNESS;

CHEMICAL MECHANICAL POLISHING;

EID: 38549132316     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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