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Applied Physics A: Materials Science and Processing

Volumn 90, Issue 4, 2008, Pages 705-710

The structure of Mo/Si multilayers prepared in the conditions of ionic assistance

(6) Zubarev, E N a Kondratenko, V V a Sevryukova, V A a Yulin, S A b Feigl, T b Kaiser, N b

a NATIONAL TECHNICAL UNIVERSITY (Ukraine)

b FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; ELECTRON MICROSCOPY; MOLYBDENUM; SILICON; X RAY DIFFRACTION;

CRYSTALLINE STRUCTURE; IONIC ASSISTANCE; LAYER DEPOSITION; MULTILAYER COMPOSITIONS;

MULTILAYERS;

EID: 38549130882 PISSN: 09478396 EISSN: 14320630 Source Type: Journal
DOI: 10.1007/s00339-007-4337-6 Document Type: Article

Times cited : (10)

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