|
|
Volumn 556-557, Issue , 2007, Pages 137-140
|
|
Optimisation of epitaxial layer growth with HCl addition by optical and electrical characterization
a
a
a
b
b
b
c
c
c
c
c
c
a
b
|
|
Author keywords
Defects; DLTS; Epitaxial growth; Hydrochloric acid; Luminescence
|
|
Indexed keywords
CHLORINE COMPOUNDS;
DEEP LEVEL TRANSIENT SPECTROSCOPY;
DEFECTS;
GROWTH RATE;
HYDROCHLORIC ACID;
LUMINESCENCE;
MORPHOLOGY;
SILICON CARBIDE;
SILICON WAFERS;
SURFACE MORPHOLOGY;
DEFECT CONCENTRATIONS;
DEPOSITION CHAMBERS;
DLTS MEASUREMENTS;
ELECTRICAL MEASUREMENT;
HIGH GROWTH RATE;
LUMINESCENCE MEASUREMENTS;
OPTICAL AND ELECTRICAL CHARACTERIZATION;
OPTIMISATIONS;
EPITAXIAL GROWTH;
|
|
EID: 38449120738
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/www.scientific.net/MSF.556-557.137 Document Type: Conference Paper |
|
Times cited : (4)
|
|
References (9)
|
