Trap assisted gas sensing mechanism in MISiC capacitors

Materials Science Forum

Volumn 556-557, Issue , 2007, Pages 621-626

  Horsfall, A B ^a   Weng, M H ^a   Mahapatra, R ^a   Wright, N G ^a  

^a NEWCASTLE UNIVERSITY   (United Kingdom)

Author keywords

Barrier Height; High ; Sensor; Trap Assisted Conduction

Indexed keywords

HIGH-K DIELECTRIC; HYDROGEN; SCHOTTKY BARRIER DIODES; SENSORS; SILICA; SILICON CARBIDE; TITANIUM DIOXIDE;

BARRIER HEIGHTS; CONDUCTION CURRENT; EXTREME ENVIRONMENT; GAS SENSING MECHANISM; HYDROGEN GAS CONCENTRATIONS; PALLADIUM CONTACTS; SENSOR STRUCTURES; TEMPERATURE RANGE;

SILICON OXIDES;

EID: 38449110045     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/MSF.556-557.621     Document Type: Conference Paper

References (12)

1. H. Wingbrant, et al: Sens Actuators B Vol. 93 (2003), p. 295
2. S. Nakagomi, et al: Chemical Sensors 17 Supplement B 50 (2001), p. 2A09
3. A. Lloyd Spetz, et al: Physica Status Solidi (a) Vol. 162 (1997), p. 493
4. J. Schalwig, et al: IEEE Sensors Journal Vol. 2 (2002), p. 394
5. C.J. Anthony, et al: Materials Science and Engineering B Vol 62 (1999), p. 460
6. M.H. Weng, et al: Mat. Sci. Semicond Process In Press
7. E.H. Nicollian, J.R. Brews: in ‘MOS Physics and Technology’, Wiley and Sons
8. W.A. Hill, C.C. Coleman: Solid State Electronics Vol. 23 (1980), p. 987
9. P. Fiorenza, et al: Journal of Applied Physics Vol. 98 (2005), 044312
10. A. Baranzahi, et al: Applied Physics Letters Vol. 67 (1995), p. 3203
11. C. Svensson, I. Lundström: Journal of Applied Physics Vol. 44 (1973), p. 4657
12. M. Housaa, et al: Journal of Applied Physics Vol. 87 (2000), p. 8619