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Volumn 7, Issue 11, 2007, Pages 4081-4083

Stress behavior of FCC metallic thin films during thermal evaporation

Author keywords

Evaporation; Flux; Intrinsic Stress; Thin Film

Indexed keywords

(1 1 0) SURFACE; (ABIOTIC AND BIOTIC) STRESS; CURVATURE (SORI); CURVATURE MEASUREMENTS; DEPOSITION TIME; EXCESS VOLUMES; EXPERIMENTAL SET UPS; HIGH MOBILITY MATERIALS; IN-SITU; LASER REFLECTION; MAXIMUM STRESS; METALLIC ATOMS; METALLIC THIN FILMS; MULTIBEAM (CO); STONEY'S FORMULA; STRESS BEHAVIOR; STRESS LEVELS; SURFACE STATES; TENSILE REGION; THIN FILM SURFACES; VACUUM THERMAL EVAPORATION (VTE);

EID: 38449104233     PISSN: 15334880     EISSN: None     Source Type: Journal    
DOI: 10.1166/jnn.2007.089     Document Type: Conference Paper
Times cited : (10)

References (14)
  • 6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.