High-pressure phase transformation as the mechanism of ductile chip formation in nanoscale cutting of silicon wafer

Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture

Volumn 221, Issue 10, 2007, Pages 1511-1519

  Cai, M B ^a   Li, X P ^a   Rahman, M ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Hydrostatic pressure; Molecular dynamics simulation; Nanoscale ductile cutting; Phase transformation; Silicon

Indexed keywords

DUCTILITY; HIGH PRESSURE EFFECTS; HYDROSTATIC PRESSURE; MOLECULAR DYNAMICS; MOLECULAR STRUCTURE; PHASE TRANSITIONS;

CHIP FORMATION ZONES; DUCTILE CHIP FORMATION; MOLECULAR DYNAMICS (MD) SIMULATIONS; NANOSCALE DUCTILE CUTTING;

SILICON WAFERS;

EID: 38149033716     PISSN: 09544054     EISSN: None     Source Type: Journal    
DOI: 10.1243/09544054JEM901     Document Type: Article

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