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Volumn 32, Issue 7-8, 2007, Pages 631-637
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A study of the effect of tool cutting edge radius on ductile cutting of silicon wafers
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Author keywords
Diamond tool; Ductile cutting; Edge radius; Silicon wafer
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Indexed keywords
BRITTLE FRACTURE;
DIAMOND CUTTING TOOLS;
MICROPROCESSOR CHIPS;
PHASE TRANSITIONS;
SILICON WAFERS;
DIAMOND TOOL;
DUCTILE CUTTING;
EDGE RADIUS;
CUTTING;
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EID: 33947221437
PISSN: 02683768
EISSN: 14333015
Source Type: Journal
DOI: 10.1007/s00170-005-0364-7 Document Type: Article |
Times cited : (87)
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References (9)
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