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Volumn 527-529, Issue PART 2, 2006, Pages 915-918
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Formation and properties of schottky diodes on 4H-SiC after high temperature annealing with graphite encapsulation
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Author keywords
4H SiC; Annealing; Atomic force microscopy; Graphite encapsulation; Schottky diodes
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Indexed keywords
ANNEALING;
ATOMIC FORCE MICROSCOPY;
ELECTRIC PROPERTIES;
ELECTRONIC PROPERTIES;
GRAPHITE;
LEAKAGE CURRENTS;
SILICON CARBIDE;
SURFACE ROUGHNESS;
CURRENT-VOLTAGE BARRIER HEIGHT;
GRAPHITE ENCAPSULATION;
SCHOTTKY BARRIER DIODES;
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EID: 38049034474
PISSN: 02555476
EISSN: 16629752
Source Type: Book Series
DOI: 10.4028/0-87849-425-1.915 Document Type: Conference Paper |
Times cited : (2)
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References (6)
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