Probability of ionization of sputtered particles as a function of their energy. Part I: Negative Si - ions

Applied Surface Science

Volumn 254, Issue 7, 2008, Pages 2059-2066

  Kudriavtsev, Yu ^a   Villegas, A ^a   Gallardo, S ^a   Asomoza, R ^a  

^a DEPARTAMENTO DE FÍSICA   (Mexico)

Author keywords

Energy distribution; Escape depth; Secondary ion yield; SIMS

Indexed keywords

IONIZATION; NEGATIVE IONS; NUCLEAR ENERGY; PROBABILITY DISTRIBUTIONS; SPUTTERING;

ENERGY DISTRIBUTIONS; ESCAPE DEPTH; SECONDARY ION YIELD;

SILICON COMPOUNDS;

EID: 37749031022     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.08.032     Document Type: Article

References (18)

1. Hofer W.O. Angular, energy, and mass distribution of sputtered particles. In: Behrisch R., and Wittmaack K. (Eds). Sputtering by Particle Bombardment III, Topics in Applied Physics vol. 64 (1991), Springer-Verlag
2. Blandin A., Nourtier A., and Hone D.W. J. Phys. 37 (1976) 396
3. Sroubek Z. Surf. Sci. 44 (1974) 47
4. Norskov J.K., and Lundquist B.I. Phys. Rev. B 19 (1979) 5661
5. Hennequin J.F. J. Phys. 29 (1968) 957
6. Yu M.L., and Lang N.D. Phys. Rev. Lett. 50 (1983) 127
7. Villegas A., Kudriavtsev Yu., Godines A., and Asomoza R. Appl. Surf. Sci. 203-204 (2003) 94-97
8. Electronic database: New Semiconductor Materials. Characteristics and Properties, Ioffe Physical Technical Institute, S-Petersburg, http://www.ioffe.ru/SVA/NSM/.
9. Wilson R.G., Stevie F.A., and Magee C.W. Secondary Ion Mass Spectrometry, A Practical Handbook for Depth Profiling and Bulk Impurity Analysis (1989), Wiley p. 543
10. Kudriatsev Y., Villegas A., Godines A., and Asomoza R. Appl. Surf. Sci. 239 (2005) 273-278
11. Lindquist T.R. Surf. Sci. 90 (1979) 548-556
12. Makarenko B.N., Popov A.B., Shaporenko A.A., and Shergin A.P. Radiat. Eff. 113 (1990) 263
13. Vasile M. Phys. Rev. B29 (1984) 3785
14. Popov A.B., Kablukov S.B., Makarenko B.N., and Shergin A.P. Nucl. Instrum. Methods B78 (1993) 290
15. Mazarov P., Samartcev A.V., and Wucher A. Appl. Surf. Sci. 252 (2006) 6452-6455
16. Klushin D., Gusev V.M., Lysenko S.A., and Urazgildin I.F. Phys. Rev. B54 (1996) 7062
17. Kudriatsev Y., Villegas A., Godines A., Gallardo S., and Asomoza R. XV International Conference on the Secondary Ion Mass Spectrometry, SIMS XV. Manchester, UK, September 12-16 (2005) 18 (Abstract Book)
18. Y. Kudriatsev, A. Villegas, S. Gallardo, G. Ramirez, R. Asomoza, On the escape depth of sputtered particles, will be published.