Miniature RF test structure for on-wafer device testing and in-line process monitoring

IEEE Transactions on Electron Devices

Volumn 55, Issue 1, 2008, Pages 462-465

  Cho, Ming Hsiang ^a,b   Lee, Ryan ^a   Peng, An Sam ^a   Chen, David ^a   Yeh, Chune Sin ^a   Wu, Lin Kun ^b  

^a UNITED MICROELECTRONICS CORPORATION   (Taiwan)

^b NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

MOSFET; Process monitoring; RF; Scribe line; Test structure

Indexed keywords

CHARACTERIZATION; ELECTRIC POTENTIAL; INTEGRATED CIRCUIT LAYOUT; INTERCONNECTION NETWORKS; MOSFET DEVICES; PROCESS MONITORING;

ON-WAFER DEVICE; TEST STRUCTURE;

SEMICONDUCTOR DEVICES;

EID: 37749030452     PISSN: 00189383     EISSN: None     Source Type: Journal    
DOI: 10.1109/TED.2007.911037     Document Type: Article

References (7)

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