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Volumn 46, Issue 12, 2007, Pages 8000-8002

Low-temperature growth of carbon nanotubes by grid-inserted plasma-enhanced chemical vapor deposition

Author keywords

Carbon nanotube; Grid inserted plasma CVD; Low temperature growth; Plasma enhanced chemical vapor deposition

Indexed keywords

GROWTH (MATERIALS); LOW TEMPERATURE EFFECTS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SCATTERING;

GRID INSERTED PLASMA CVD; LOW TEMPERATURE GROWTH;

CARBON NANOTUBES;

EID: 37549056546 PISSN: 00214922 EISSN: 13474065 Source Type: Journal
DOI: 10.1143/JJAP.46.8000 Document Type: Article

Times cited : (9)

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