Preparation of ferroelectric PZT thin films by plasma enhanced chemical vapor deposition using metalorganic precursors

Journal of Industrial and Engineering Chemistry

Volumn 14, Issue 1, 2008, Pages 89-93

  Lee, Won Gyu ^a   Kwon, Yong Jung ^a  

^a Kangwon National University   (South Korea)

Author keywords

Ferroelectric; Lead zirconium titanate; PECVD

Indexed keywords

EID: 37549025805     PISSN: 1226086X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jiec.2007.07.005     Document Type: Article

References (21)

1. Scott J.F., Paz de Araujo C.A., and McMillan L.D. Proc. IEEE Ultrason. Symp. (1989) 299
2. Paz de Araujo C.A., McMillan L.D., Melni- ck B.M., Cuchiaro J.D., and Scott J.F. Ferroelectrics 104 (1990) 241
3. Carrano J., Sudhama C., Al Tasch J.L., and Miller W. IEDM (1989) 255
4. Krupanidhi S.B., Maffei N., Sayer M., and El- Assal K. J. Appl. Phys. 54 (1983) 6601
5. Fukami T., Minemura I., Hiroshima Y., and Osa- da T. Jpn. J. Appl. Phys. 30 (1991) 2155
6. Ryder Jr. D.F., and Raman N.K. J. Electron. Mat. 21 (1992) 971
7. Chen J., Udayakumar K.R., Brooks K.G., and Cross L.E. J. Appl. Phys. 71 (1992) 4465
8. Takahashi Y., and Yamaguchi K. J. Mat. Sci. 25 (1990) 3950
9. Tuttle B.A., Headley T.J., Bunker B.C., Schwartz R.W., Zender T.J., Hernandez C.L., Goodnow D.C., Tissot R.J., Michael J., and Carim A.H. J. Mater. Res. 7 (1992) 1876
10. Peng C.H., and Desu S.B. Appl. Phys. Lett. 61 (1992) 16
11. Choi J.H., and Kim H.-G. J. Appl. Phys. 74 (1993) 6413
12. Wang C.H., Won D.J., and Choi D.J. J. Korean Phys. Soc. 37 (2000) 1062
13. Horwitz J.S., Grabowski K.S., Chrisey D.B., and Leuchtner R.E. Appl. Phys. Lett. 59 (1991) 1565
14. Auciello O., Mantese L., Duarte J., Chen X., Rou S.H., Kingon A.I., Schreiner A.F., and Krauss A.R. J. Appl. Phys. 73 (1993) 5197
15. Mihara T., Mochizuki S., Kimura S., and Maka- be R. Jpn. J. Appl. Phys. 31 (1992) 1872
16. Nishida K., Shirakata K., Osada M., and Katoda T. J. Cryst. Growth 272 (2004) 789
17. Lee W.G., and Woo S.I. J. Ind. Eng. Chem. 10 (2004) 379
18. Lee W.G., and Woo S.I. Integer. Ferroelectr. 5 (1994) 107
19. Krupanidhi S.B., Hu H., and Kumar V. J. Appl. Phys. 71 (1992) 376
20. Kushida K., and Takeuchi H. Appl. Phys. Lett. 50 (1987) 1800
21. Surowiak Z., Brodacki J., and Zasojz H. Rev. Sci. Instrum. 49 (1978) 1350