Differential etching of chalcogenides for infrared photonic waveguide structures

Journal of Non-Crystalline Solids

Volumn 354, Issue 10-11, 2008, Pages 813-816

  Riley, Brian J ^a   Sundaram, S K ^a   Johnson, Bradley R ^a   Saraf, Laxmikant V ^a  

^a PACIFIC NORTHWEST NATIONAL LABORATORY   (United States)

Author keywords

Chalcogenides; Chemical vapor deposition; Infrared properties; Planar waveguides

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ETCHING; GLASS; PHOTOLITHOGRAPHY; PHOTONIC BAND GAP; PLANAR WAVEGUIDES;

GLASS COMPOSITIONS; INFRARED PROPERTIES; PHOTOLITHOGRAPHIC MASKING; PHOTONIC WAVEGUIDES; SODIUM HYDROXIDE;

CHALCOGENIDES;

EID: 37349030444     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2007.08.061     Document Type: Article

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