Thickness mode high frequency MEMS piezoelectric micro ultrasound transducers

Journal of Electroceramics

Volumn 19, Issue 4, 2007, Pages 383-386

  Dauchy, F ^a   Dorey, R A ^a  

^a CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

PMUT; PZT; Thick Film; Transducer; Ultrasound

Indexed keywords

INFILTRATION; MEMS; PIEZOELECTRIC MATERIALS; SOL-GEL PROCESS; THICK FILMS; WET ETCHING;

COMPOSITE SLURRY; PMUT; REPEATED LAYERING;

ULTRASONIC TRANSDUCERS;

EID: 37249058404     PISSN: 13853449     EISSN: 15738663     Source Type: Journal    
DOI: 10.1007/s10832-007-9317-x     Document Type: Article

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