SCOPUS 정보 검색 플랫폼

Volumn 62, Issue 4-5, 2008, Pages 651-654

Performance improvement of a vibration-powered electromagnetic generator by reduced silicon surface roughness

Author keywords

Chemical polishing; Microelectromagnetic; Microgenerator; Silicon wet etch; Vibration power harvesting

Indexed keywords

ACETIC ACID; CHEMICAL POLISHING; FABRICATION; HYDROFLUORIC ACID; SILICON; SURFACE ROUGHNESS;

ELECTROMAGNETIC GENERATOR; FUMING NITRIC; SILICON SURFACE ROUGHNESS; VIBRATION-POWERED ELECTROMAGNETIC GENERATOR;

ELECTROMAGNETIC WAVES;

EID: 37249055426 PISSN: 0167577X EISSN: None Source Type: Journal
DOI: 10.1016/j.matlet.2007.06.050 Document Type: Article

Times cited : (12)

References (14)

1
- 0026882936
- Connally J.A., and Brown S.B. Science 256 (1992) 1537
- (1992) Science , vol.256 , pp. 1537
- Connally, J.A.¹ Brown, S.B.²

2
- 0002259086
- Biezeno C.B., Burgers J.M., and Waltman J.M. (Eds), The Netherlands, Delft
- Griffith A.A. In: Biezeno C.B., Burgers J.M., and Waltman J.M. (Eds). Proceedings of the First International Congress on Applied Mechanics (1924), The Netherlands, Delft 55
- (1924) Proceedings of the First International Congress on Applied Mechanics , pp. 55
- Griffith, A.A.¹

3
- 37249060099
- Beeby S.P., Tudor M.J., Torah R.N., Koukharenko E., and Roberts S. DTIP'06 MEMS & MOEMS (2006) 286
- (2006) DTIP'06 MEMS & MOEMS , pp. 286
- Beeby, S.P.¹ Tudor, M.J.² Torah, R.N.³ Koukharenko, E.⁴ Roberts, S.⁵

4
- 0034468211
- Namazu T., Isono Y., and Tanaka T. J. Microelectromech. 9 4 (2000) 450
- (2000) J. Microelectromech. , vol.9 , Issue.4 , pp. 450
- Namazu, T.¹ Isono, Y.² Tanaka, T.³

5
- 0036329379
- Sundararajan S., Bhushan B., Namazu T., and Isono Y. Ultramicroscopy 91 (2002) 111
- (2002) Ultramicroscopy , vol.91 , pp. 111
- Sundararajan, S.¹ Bhushan, B.² Namazu, T.³ Isono, Y.⁴

6
- 0033702573
- Chen K.S., Ayon A., and Spearing S.M. J. Am. Ceram. Soc 83 6 (2000) 1476
- (2000) J. Am. Ceram. Soc , vol.83 , Issue.6 , pp. 1476
- Chen, K.S.¹ Ayon, A.² Spearing, S.M.³

7
- 0007090168
- Umbach C.C., eselak B.W., Blakely J.M., and Shen Q. J. Vac. Sci. Technol., B 14 6 (1996) 3420
- (1996) J. Vac. Sci. Technol., B , vol.14 , Issue.6 , pp. 3420
- Umbach, C.C.¹ eselak, B.W.² Blakely, J.M.³ Shen, Q.⁴

8
- 0141607071
- Yun S.S., and Lee J.H. J. Micromechanics Microengineering 13 (2003) 721
- (2003) J. Micromechanics Microengineering , vol.13 , pp. 721
- Yun, S.S.¹ Lee, J.H.²

9
- 0017266754
- Schwartz B., and Robbins H. J. Electrochem. Soc (1976) 1903
- (1976) J. Electrochem. Soc , pp. 1903
- Schwartz, B.¹ Robbins, H.²

10
- 0020127035
- Petersen K.E. IEEE 70 5 (1982) 420
- (1982) IEEE , vol.70 , Issue.5 , pp. 420
- Petersen, K.E.¹

11
- 0015772701
- Muraoka H., Ohhashi T., and Sumitomo Y. Semiconductor Silicon Electrochem. Soc. 1 (1973) 327
- (1973) Semiconductor Silicon Electrochem. Soc. , vol.1 , pp. 327
- Muraoka, H.¹ Ohhashi, T.² Sumitomo, Y.³

12
- 0342906644
- Kruger D., Gaworzewski P., and Kurps R. J. Vac. Technol B 1 (2000) 477
- (2000) J. Vac. Technol B , vol.1 , pp. 477
- Kruger, D.¹ Gaworzewski, P.² Kurps, R.³

14
- 33747622518
- doi:10.1007/s00542-006-0137-8
- Koukharenko E., Beeby S.P., Tudor M.J., White N.M., O'Donnell T., Saha C., Kulkarni S., and Roy S. J. Microsyst. Technol. 12 10-11 (September 2006) 1071 doi:10.1007/s00542-006-0137-8
- (2006) J. Microsyst. Technol. , vol.12 , Issue.10-11 , pp. 1071
- Koukharenko, E.¹ Beeby, S.P.² Tudor, M.J.³ White, N.M.⁴ O'Donnell, T.⁵ Saha, C.⁶ Kulkarni, S.⁷ Roy, S.⁸

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.