Fabrication of high aspect ratio Si nanogratings with smooth sidewalls for a deep UV-blocking particle filter

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2645-2648

  Mukherjee, Pran ^a   Kang, Myung Gyu ^a   Zurbuchen, Thomas H ^a   Guo, L Jay ^a   Herrero, Fred A ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b NASA GODDARD SPACE FLIGHT CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

NANOGRATINGS; PARTICLE FILTERS; TRANSMISSION GRATINGS;

ASPECT RATIO; LITHOGRAPHY; REACTIVE ION ETCHING; ULTRAVIOLET PHOTOELECTRON SPECTROSCOPY; WAVE TRANSMISSION;

SILICON;

EID: 37149044100     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2804612     Document Type: Article

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