Nanoscale freestanding gratings for ultraviolet blocking filters

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 3911-3916

  Van Beek, J T M ^a,c   Fleming, R C ^a   Hindle, P S ^a   Prentiss, J D ^a   Schattenburg, M L ^a   Ritzau, S ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b LOS ALAMOS NATIONAL LABORATORY   (United States)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001739721     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590434     Document Type: Article

References (9)

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