Global Sensor Feedback for Automatic Nanohandling Inside a Scanning Electron Microscope

Intelligent Production Machines and Systems - 2nd I*PROMS Virtual International Conference 3-14 July 2006

Volumn , Issue , 2006, Pages 289-294

  Sievers, T ^a  

^a UNIVERSITY OF OLDENBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 37049008327     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1016/B978-008045157-2/50054-7     Document Type: Chapter

References (14)

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