Automatic integrated circuit die positioning in the scanning electron microscope

Scanning

Volumn 24, Issue 2, 2002, Pages 86-91

  Tan, H W ^a   Phang, J C H ^a   Thong, John T L ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Automation; Die positioning; Registration; Scanning electron microscopy; Template matching

Indexed keywords

FAILURE ANALYSIS; SCANNING ELECTRON MICROSCOPY;

FAILURE SITES;

INTEGRATED CIRCUITS;

ARTICLE; AUTOMATION; IMAGING SYSTEM; INTEGRATED CIRCUIT; POSITION; PRIORITY JOURNAL; SCANNING ELECTRON MICROSCOPY;

EID: 0036310429     PISSN: 01610457     EISSN: None     Source Type: Journal    
DOI: 10.1002/sca.4950240206     Document Type: Article

References (7)

1. A survey of image registration techniques
2. On the minimum number of templates required for shift, rotation and size invariant pattern recognition
3. Fast template matching
4. An automated image alignment system for the scanning electron microscope
5. Automatic DRAM cell location in the SEM