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Volumn 945, Issue , 2007, Pages 170-179

Effects of chip-package interaction on mechanical reliability of Cu interconnects

Author keywords

Chip package interaction; Energy release rate; Reliability

Indexed keywords


EID: 36849042738     PISSN: 0094243X     EISSN: 15517616     Source Type: Conference Proceeding    
DOI: 10.1063/1.2815777     Document Type: Conference Paper
Times cited : (4)

References (9)
  • 1
    • 36849009879 scopus 로고    scopus 로고
    • The International Technology Roadmap for Semiconductors 2003 edition, Semiconductor Industry Association, San Jose, CA., 2003.
    • The International Technology Roadmap for Semiconductors 2003 edition, Semiconductor Industry Association, San Jose, CA., 2003.
  • 2
    • 84961755707 scopus 로고    scopus 로고
    • Evaluation and analysis for mechanical strengths of low k dielectrics by a finite element method
    • N. Aoi, T. Fukuda and H. Yanazawa, "Evaluation and analysis for mechanical strengths of low k dielectrics by a finite element method" in Proc. IEEE 2002 Int. Interconnect Technol. Conf., 2002, pp. 72-74.
    • (2002) Proc. IEEE 2002 Int. Interconnect Technol. Conf , pp. 72-74
    • Aoi, N.1    Fukuda, T.2    Yanazawa, H.3
  • 5
    • 0003287633 scopus 로고
    • 2D- and 3D-Applications of the improved and generalized Modified Crack Closure Integral Method
    • edited by S. N. Atluri and G. Yagawa, Spring Verlag
    • F. G. Bucholz, R. Sistla and T. Krishnamurthy, "2D- and 3D-Applications of the improved and generalized Modified Crack Closure Integral Method", in Computational Mechanics '88, edited by S. N. Atluri and G. Yagawa, Spring Verlag, 1988.
    • (1988) Computational Mechanics '88
    • Bucholz, F.G.1    Sistla, R.2    Krishnamurthy, T.3
  • 7
    • 33751254086 scopus 로고    scopus 로고
    • Chip-Packaging Interaction and Reliability Impact on Cu/Low k Interconnects
    • Proc. Inter. Stress Workshop, AIP Conf. Proc
    • G.T. Wang, X.F. Zhang and P.S. Ho, "Chip-Packaging Interaction and Reliability Impact on Cu/Low k Interconnects", in Proc. Inter. Stress Workshop, AIP Conf. Proc. Series, Vol. 817, 2005, pp/ 73-82.
    • Series , vol.817
    • Wang, G.T.1    Zhang, X.F.2    Ho, P.S.3
  • 8


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.