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Volumn 30, Issue 4, 2007, Pages 579-584

Dual process dielectric formation for decoupling capacitors on flexible substrates

Author keywords

Metal insulator metal (MIM); Metal insulator metal; Radio frequency (RF); Radiofrequency

Indexed keywords

CAPACITORS; OXIDATION; PERMITTIVITY; PRINTED CIRCUIT BOARDS; RADIOFREQUENCY SPECTROSCOPY; REACTIVE SPUTTERING; SUBSTRATES; TANTALUM COMPOUNDS; THIN FILMS;

EID: 36849018415     PISSN: 15213331     EISSN: None     Source Type: Journal    
DOI: 10.1109/TCAPT.2007.910915     Document Type: Conference Paper
Times cited : (3)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.