Electrical properties/Doping efficiency of doped microcrystalline silicon layers prepared by hot-wire chemical vapor deposition

Thin Solid Films

Volumn 516, Issue 5, 2008, Pages 580-583

  Kumar, P ^a   Schroeder, B ^a  

^a University of Koblenz Landau   (Germany)

Author keywords

Doping; Electrical properties; Hot wire CVD; Microcrystalline; Nanocrystalline; Silicon

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DOPING (ADDITIVES); ELECTRIC PROPERTIES; HALL EFFECT; MICROCRYSTALLINE SILICON; NANOCRYSTALLINE MATERIALS;

DOPANT ATOMS; DOPING EFFICIENCY; HOT-WIRE CVD;

THIN FILMS;

EID: 36749043131     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.035     Document Type: Article

References (16)

1. Mahan A.H., Carapella J., Nelson B.P., Crandall R.S., and Balberg I. J. Appl. Phys. 69 (1991) 6728
2. Mahan A.H. Proceedings of 3rd World Conference on Photovoltaic Energy Conversion, Osaka, Japan vol. 2 (2003) 1156
3. Bauer S., Schroeder B., Herbst W., and Oechsner H. Proc. of the 2nd WC PVSEC (1998) 363
4. Schropp R.E.I., Stannowski B., Brockhoff A.M., Van Veenendaal P.A.T.T., and Rath J.K. Mater. Phys. Mech. 1 (2000) 73
5. Klein S., Finger F., Carius R., Kluth O., Neto L.B., Wagner H., and Stutzmann M. Proc. of the 17th ECPVSEC, Munich, Germany (2001) 2965
6. Matsumura H., Katouno K., Itoh M., and Masuda A. Mater. Res. Soc. Symp. Proc. 762 (2003) A13.2
7. Alpuim P., Chu V., and Conde J.P. J. Vac. Sci. Technol., A, Vac. Surf. Films 19 (2001) 2328
8. Broguiera P., Chu V., Ferro A.C., and Conde J.P. J. Vac. Sci. Technol., A, Vac. Surf. Films 15 (1997) 2968
9. Kumar P., Kupich M., Grunsky D., and Schroeder B. Thin Solid Films 260-263 (2006) 501
10. Weber U., Koob M., Dusane R.O., Mukherjee C., Seitz H., and Schroeder B. Proc. of the 16th EC PVSEC, Glasgow (2000) 286
11. Matsui T., Kondo M., and Matsuda A. J. Non-Cryst. Solids 338-340 (2004) 646
12. Dasgupta A., Lambertz A., Vetterl O., Finger F., Carius R., Zastrow U., and Wagner H. 16th European Photovoltaic Solar Energy Conference and Exhibition (2000) Paper No: [477] VB1/38
13. Finger F., Mueller J., Malten C., Carius R., and Wagner H. J. Non-Cryst. Solids 266-269 (2000) 511
14. A. Gordijn, Microcrystalline silicon for thin-film solar cells, PhD Thesis, Utrecht University, Netherland, 2005.
15. Stutzmann M., Biegelsen D.K., and Street R.A. Phys. Rev., B 35 (1987) 5666
16. Street R.A. Phys. Rev. Lett. 49 (1982) 1187