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Volumn 762, Issue , 2003, Pages 491-496
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Properties of high quality p-type micro-crystalline-Si prepared by Cat-CVD
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Author keywords
[No Author keywords available]
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Indexed keywords
ACTIVATION ENERGY;
BORON;
CATALYSIS;
COATING TECHNIQUES;
CRYSTALLINE MATERIALS;
CRYSTALLIZATION;
DOPING (ADDITIVES);
ELECTRIC CONDUCTIVITY;
LASER APPLICATIONS;
OPTICAL PROPERTIES;
PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION;
RAMAN SPECTROSCOPY;
SOLAR CELLS;
THICK FILMS;
ZINC OXIDE;
CATALYZERS;
GAS PRESSURES;
SILICON;
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EID: 1642479942
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-762-a13.2 Document Type: Conference Paper |
Times cited : (1)
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References (4)
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