Doping properties of boron-doped microcrystalline silicon from B 2H6 and BF3: Material properties and solar cell performance

Journal of Non-Crystalline Solids

Volumn 338-340, Issue 1 SPEC. ISS., 2004, Pages 646-650

  Matsui, Takuya ^a   Kondo, Michio ^a   Matsuda, Akihisa ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BORON COMPOUNDS; COMPOSITION; CRYSTALLINE MATERIALS; DEPOSITION; DOPING (ADDITIVES); HYDROGENATION; MIXTURES; SYNTHESIS (CHEMICAL);

CONVERSION EFFICIENCIES; DOPING EFFICIENCIES; GLOW DISCHARGE PLASMAS; MICROCRYSTALLINE SILICON;

SILICON;

EID: 2942534313     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2004.03.073     Document Type: Conference Paper

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