UV-visible absorption spectra of silicon CVD intermediates

Thin Solid Films

Volumn 516, Issue 5, 2008, Pages 517-520

  Nakamura, Seigo ^a   Matsugi, Akira ^a   Susa, Akio ^a   Koshi, Mistuo ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

CRDS; Si2H2; Silane; UV vis absorption

Indexed keywords

ABSORPTION SPECTRA; BAND STRUCTURE; CHEMICAL VAPOR DEPOSITION; REACTION KINETICS; ULTRAVIOLET RADIATION;

CAVITY RING-DOWN SPECTROSCOPY (CRDS); TRANSIENT ABSORPTION; UV-VIS ABSORPTION;

SEMICONDUCTING SILICON;

EID: 36749027633     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.205     Document Type: Article

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