Medical applications of MEMS

Wescon Conference Record

Volumn , Issue , 1995, Pages 300-306

  Maluf, Nadim I ^a   Gee, Dale A ^a   Petersen, Kurt E ^a   Kovacs, Gregory T A ^a  

^a Lucas NovaSensor   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BIOMEDICAL EQUIPMENT; BLOOD; INTEGRATED CIRCUIT MANUFACTURE; MEDICAL APPLICATIONS; MEDICINE; MICROMACHINING; MONITORING; PRESSURE; SILICON SENSORS; TRANSDUCERS;

BATCH MODE MANUFACTURING TECHNIQUES; BIOMEDICAL INSTRUMENTATION; DISPOSABLE PRESSURE SENSOR; MICROELECTROMECHANICAL SYSTEMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0029485359     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)