Implantable medical drug delivery systems using microelectromechanical systems technology

1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology - Proceedings

Volumn , Issue , 2000, Pages 487-490

  Cao, Li ^a   Mantell, Susan ^b   Polla, Dennis ^b  

^a Iowa State University of Science and Technology   (United States)

^b University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANODIC OXIDATION; ELECTROMECHANICAL DEVICES; FABRICATION; FERROELECTRIC CERAMICS; MEMS; PUMPS; SEMICONDUCTING LEAD COMPOUNDS;

DRUG DELIVERY SYSTEM; LEAD ZIRCONATE TITANATE; MEMS FABRICATION; MICROELECTROMECHANICAL-SYSTEMS TECHNOLOGIES; PERISTALTIC MOTION; RADIO-FREQUENCY SPUTTERING; SILICON MEMBRANES; STATE-OF-THE ART FABRICATIONS;

REACTIVE ION ETCHING;

EID: 84952665972     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MMB.2000.893832     Document Type: Conference Paper

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