Dimensional measurement of microholes with silicon-based micro twin probes

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 334-339

  Kim, B J ^a   Masuzawa, T ^a   Fujita, H ^a   Tominaga, A ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINING; NATURAL FREQUENCIES; RESIDUAL STRESSES; SILICON; STRESS CONCENTRATION;

MICROHOLES; SILICON BASED MICRO TWIN PROBES;

PROBES;

EID: 0031654460     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)