Microsystem tool for microsystems characterization profile measurement of high aspect-ratio microstructures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4592, Issue , 2001, Pages 244-251

  Pourciel, Jean Bernard ^a   Lebrasseur, Eric ^a   Bourouina, Tarik ^a   Masuzawa, Takahisa ^a   Fujita, Hiroyuki ^a  

^a INSTITUTE OF INDUSTRIAL SCIENCE   (Japan)

Author keywords

Metrology for microsystems; Microstructures; Profile measurement; Stylus Profiler

Indexed keywords

ALGORITHMS; ASPECT RATIO; CHARACTERIZATION; ELECTRIC DISCHARGE MACHINING; MICROSTRUCTURE; STRAIN;

MICROSYSTEMS CHARACTERIZATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0035768524     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.448973     Document Type: Conference Paper

References (7)

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