Morphological and structural characterizations of CrSi 2 nanometric films deposited by laser ablation

Applied Surface Science

Volumn 254, Issue 4, 2007, Pages 1224-1227

  Caricato, A P ^a   Leggieri, G ^a   Luches, A ^a   Romano, F ^a   Barucca, G ^b   Mengucci, P ^b   Mulenko, S A ^c  

^a UNIVERSITY OF SALENTO   (Italy)

^b UNIVERSITÀ POLITECNICA DELLE MARCHE   (Italy)

^c INSTITUTE OF METAL PHYSICS   (Ukraine)

Author keywords

Electron microscopy; Pulsed laser deposition; Thin film; X ray diffraction; X ray reflectivity

Indexed keywords

CHEMICAL ANALYSIS; CHROMIUM COMPOUNDS; FILM GROWTH; LASER ABLATION; PULSED LASER DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCANNING ELECTRON MICROSCOPY; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

CHROMIUM DISILICIDE; ROOM TEMPERATURE; X-RAY REFLECTIVITY (XRR);

THIN FILMS;

EID: 36248952242     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.09.026     Document Type: Article

References (13)

1. Galkin N.G., Maslov A.M., and Konchenko A.V. Thin Solid Films 311 (1997) 230
2. Heck C., Kusaka M., Hira M., Iwami M., and Yokota Y. Thin Solid Films 281-282 (1996) 94
3. Bost M.C., and Mahan J.E. J. Appl. Phys. 63 (1988) 839
4. Vantomme A., Nicolet M.A., Long R.G., Mahan J.E., and Pool F.S. Appl. Surf. Sci. 73 (1993) 146
5. Haderbache L., Wetzel P., Pirri C., Perucchetti J.C., Bolmont D., and Gewinner G. Surf. Sci. 209 (1989) L139
6. Zhu H.N., and Liu B.X. Appl. Surf. Sci. 161 (2000) 240
7. Galkin N.G., Velitchko T.V., Skripka V.S., and Khrustalev A.B. Thin Solid Films 280 (1996) 211
8. Luches A., Mulenko S.A., Veiko V.P., Caricato A.P., Chuiko V.A., Kudryavtsev Y.V., Lopato A.V., Petrov A.A., Romano F., and Valerini D. Appl. Surf. Sci. 253 (2007) 6512
9. Version 3.03 Bruker AXS GmbH, 2005.
10. Mihailescu I.N., Chitica N., Teodorescu V.S., De Giorgi M.L., Leggieri G., Luches A., Martino M., Perrone A., and Dubreuil B. J. Vac. Sci. Technol. A 11 (1993) 2577
11. Doolittle L.R. Nucl. Instrum. Meth. B 9 (1985) 344
12. Filolenko O., Flake M., Hortenbach H., Henning A., Beddies G., and Hinneberg H.-J. Appl. Surf. Sci. 227 (2004) 341
13. Lien C.-D., Nicolet M.-A., and Lau S.S. Thin solid films 143 (1986) 63A