Laser-assisted synthesis of semiconductor chromium disilicide films

Applied Surface Science

Volumn 253, Issue 15, 2007, Pages 6512-6516

  Luches, A ^a   Mulenko, S A ^b   Veiko, V P ^c   Caricato, A P ^a   Chuiko, V A ^c   Kudryavtsev, Y V ^b   Lopato, A V ^c   Petrov, A A ^c   Romano, F ^a   Valerini, D ^a  

^a UNIVERSITY OF SALENTO   (Italy)

^b INSTITUTE OF METAL PHYSICS   (Ukraine)

^c ITMO UNIVERSITY   (Russian Federation)

Author keywords

Direct current sputtering; Laser induced film transfer; Silicides

Indexed keywords

AMORPHOUS FILMS; CHROMIUM COMPOUNDS; ELECTRIC RESISTANCE; EVAPORATION; LASER ABLATION; OPTICAL PROPERTIES; SILICON; SPUTTERING; SYNTHESIS (CHEMICAL); WAVELENGTH;

DIRECT CURRENT SPUTTERING; LASER-INDUCED FILM TRANSFER; PULSED LASER ABLATION; SEMICONDUCTING PROPERTIES;

SEMICONDUCTING FILMS;

EID: 34248140806     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2007.01.023     Document Type: Article

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