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Volumn 202, Issue 4-7, 2007, Pages 786-789
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Characterization of quaternary (Cr,Al)N-based films synthesized by the cathodic arc method
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Author keywords
(Cr,Al)N; Microhardness; Microstructure; Thermal stability
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Indexed keywords
ANNEALING;
CHARACTERIZATION;
CRYSTAL MICROSTRUCTURE;
LATTICE CONSTANTS;
MICROHARDNESS;
SYNTHESIS (CHEMICAL);
THERMODYNAMIC STABILITY;
CATHODIC ARC METHOD;
CHROMIUM ALUMIMUM NITRIDE;
NITROGEN COMPOUNDS;
ANNEALING;
CHARACTERIZATION;
CRYSTAL MICROSTRUCTURE;
LATTICE CONSTANTS;
MICROHARDNESS;
NITROGEN COMPOUNDS;
SYNTHESIS (CHEMICAL);
THERMODYNAMIC STABILITY;
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EID: 36049044516
PISSN: 02578972
EISSN: None
Source Type: Journal
DOI: 10.1016/j.surfcoat.2007.05.050 Document Type: Article |
Times cited : (10)
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References (21)
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