New ferroelectric material for embedded FRAM LSIs

Fujitsu Scientific and Technical Journal

Volumn 43, Issue 4, 2007, Pages 502-507

  Maruyama, Kenji ^a,b,c   Kondo, Masao ^a,c,e   Singh, Sushil K ^a,d   Ishiwara, Hiroshi ^{b,c,d,f,g,h,i}  

^a FUJITSU LABORATORIES LTD   (Japan)

^b IEEE

^c JAPAN SOCIETY OF APPLIED PHYSICS   (Japan)

^d TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^e Ceramic Society of Japan (CSJ)   (Japan)

^f Institute of Electronics   (Japan)

^g Materials Research Society   (United States)

^h ELECTROCHEMICAL SOCIETY   (Japan)

ⁱ Institute of Electrical Engineers of   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

FERROELECTRIC RANDOM ACCESS MEMORY (FRAM); INFORMATION NETWORK INFRASTRUCTURES; TICKETLESS TRANSPORTATION SERVICES;

AUTHENTICATION; ELECTRONIC COMMERCE; LSI CIRCUITS; MOBILE TELECOMMUNICATION SYSTEMS; RANDOM ACCESS STORAGE;

FERROELECTRIC MATERIALS;

EID: 36049037258     PISSN: 00162523     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (7)

1. S. Yoshikawa: Proposal for new industry-university research collaborative partnership for enhancing industrial competitiveness, (in Japanese), OYO BUTURI, 75, 1, p.69-71 (2006).
2. T. Yamazaki et al.: Advanced 0.5 μm FRAM device technology with full compatibility of halfmicron CMOS logic device. IEDM Tech. Dig., December 1997, p.613-616.
3. Y. Horii et al.: 4 M bit embedded FRAM for high performance system on chip (SoC) with large switching charge, reliable retention and high imprint resistance. IEDM Tech. Dig., December 2002, p.539-542.
4. Y. Nagano et al.: 0.18 μm SBT-Based Embedded FeRAM Operating at a Low Voltage of 1.1 V. Symp. VLSI Technol. 2003, p.171-172.
5. S. K. Singh et al.: Room temperature ferroelectric properties of Mn-substituted BiFeO3 thin films deposited on Pt electrodes using chemical solution deposition. Appl. Phys. Lett., 88, 262908 (2006).
6. J. Wang et al.: Epitaxial BiFeO3 Multiferroic Thin Film Heterostructures. Science, 299, No.5613, p.1719-1722 (2003).
7. K. Y. Yun et al.: Structural and multiferroic properties of BiFeO3 thin films at room temperature. J. Appl. Phys, 96, p.3399-3403 (2004).