R&D of a pixel sensor based on 0.15 μ m fully depleted SOI technology

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 582, Issue 3, 2007, Pages 861-865

  Tsuboyama, Toru ^a   Arai, Yasuo ^a   Fukuda, Koichi ^b   Hara, Kazuhiko ^c   Hayashi, Hirokazu ^b   Hazumi, Masashi ^a   Ida, Jiro ^b   Ikeda, Hirokazu ^d   Ikegami, Yoichi ^a   Ishino, Hirokazu ^e   Kawasaki, Takeo ^f   Kohriki, Takashi ^a   Komatsubara, Hirotaka ^b   Martin, Elena ^g   Miyake, Hideki ^h   Mochizuki, Ai ^c   Ohno, Morifumi ^b   Saegusa, Yuuji ^e   Tajima, Hiro ⁱ   Tajima, Osamu ^a   Takahashi, Tomiaki ^e   Terada, Susumu ^a   Unno, Yoshinobu ^a   Ushiroda, Yutaka ^a   Varner, Gary ^g   more..

^a HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION KEK   (Japan)

^b OKI ELECTRIC INDUSTRY CO   (Japan)

^c UNIVERSITY OF TSUKUBA   (Japan)

^d JAPAN AEROSPACE EXPLORATION AGENCY   (Japan)

^e TOKYO INSTITUTE OF TECHNOLOGY   (Japan)

^f NIIGATA UNIVERSITY   (Japan)

^g UNIVERSITY OF HAWAII   (United States)

^h OSAKA UNIVERSITY   (Japan)

ⁱ SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

Author keywords

Monolithic pixel sensor; SOI CMOS technology

Indexed keywords

CMOS INTEGRATED CIRCUITS; ELECTRIC INSULATORS; MONOLITHIC INTEGRATED CIRCUITS;

MONOLITHIC PIXEL SENSOR; RADIATION SENSOR; SOI CMOS TECHNOLOGY;

SILICON SENSORS;

EID: 36049034313     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2007.07.111     Document Type: Article

References (14)

1. Kucewicz W., et al. Nucl. Instr. and Meth. A 541 (2005) 172
2. 〈http://rd.kek.jp/index.html〉.
3. A. Uchiyama, et al., IEEE Trans. on Electron Dev. 49 (2006) 2296.
4. Morikawa K., Kajita Y., and Mitarashi M. Oki Tech. Rev. 196 (2003) 61. http://www.oki.com/en/otr/196/downloads/otr-196-R15.pdf 〈http://www.oki.com/en/otr/196/downloads/otr-196-R15.pdf〉.
5. SOITEC, Silicon-On-Insulator Technologies, SA. 〈http://www.soitec.com〉.
6. Celler G.K., and Cristoloveanu S. J. Appl. Phys. 93 (2003) 4955
7. French M.J., et al. Nucl. Instr. and Meth. A 466 (2001) 359
8. 〈http://wwwhephy.oeaw.ac.at/u3w/f/friedl/www/belle/apvdaq_reference_v0.03.pdf〉.
9. Y. Arai, et al., IEEE Nuclear Science Symposium, Conference Record, N34-4, 2006.
10. Ikeda H., et al. Nucl. Instr. and Meth. A 579 (2007) 701
11. Ikegami Y., et al. Nucl. Instr. and Meth. A 579 (2007) 706
12. Tajima H., et al. IEEE Trans. Nucl. Sci. NS-52 (2005) 2749
13. 〈http://www.tcad-international.com/ENEXSS_e.html〉.
14. 〈http://www.silvaco.com/〉.