Development of monolithic active pixel detector in SOI technology

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 541, Issue 1-2, 2005, Pages 172-177

  Kucewicz, W ^a   Bulgheroni, A ^b   Caccia, M ^b   Grabiec, P ^c   Marczewski, J ^c   Niemiec, H ^a  

^a AGH UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Poland)

^b UNIVERSITY OF INSUBRIA   (Italy)

^c Department of Micro and Nanotechnology of Wide Bandgap Semiconductors   (Poland)

Author keywords

Active pixel detector; Silicon detector; SOI technology

Indexed keywords

BONDING; HIGH ENERGY PHYSICS; IONIZING RADIATION; READOUT SYSTEMS; SILICON SENSORS; SILICON WAFERS;

ACTIVE PIXEL DETECTORS; FRONT-END ELECTRONICS; SILICON DETECTORS; SOI TECHNOLOGY;

SILICON ON INSULATOR TECHNOLOGY;

EID: 15844368289     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2005.01.054     Document Type: Conference Paper

References (8)

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