Fatigue test of Al-3%Ti using axial loading testing machine for RF MEMS switch

Solid State Phenomena

Volumn 110, Issue , 2006, Pages 3-8

  Park, Jun Hyub ^a   Lee, Chang Seung ^b   Kim, Yun Jae ^c  

^a Tongmyong University of Information Technology   (South Korea)

^b Samsung Advanced Institute of Technology (SAIT)   (South Korea)

^c Korea University   (South Korea)

Author keywords

Axial loading; Fatigue property; MEMS material; Static property

Indexed keywords

FATIGUE OF MATERIALS; MEMS; MOBILE PHONES; STRENGTH OF MATERIALS; TENSILE TESTING; THIN FILM CIRCUITS;

AXIAL LOADING; FATIGUE PROPERTY; FATIGUE STRENGTH COEFFICIENT; MEMS MATERIALS; RADIO FREQUENCY; STATIC PROPERTY;

FATIGUE TESTING;

EID: 36049020945     PISSN: 10120394     EISSN: None     Source Type: Book Series    
DOI: 10.4028/3-908451-15-9.3     Document Type: Conference Paper

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