Properties of pulsed magnetron sputtered TiO2 coatings grown under different magnetron configurations and powerdeliver modes

Plasma Processes and Polymers

Volumn 4, Issue SUPPL.1, 2007, Pages

  Kok, Yin Nan ^a   Kelly, Peter J ^a  

^a MANCHESTER METROPOLITAN UNIVERSITY   (United Kingdom)

Author keywords

FFE; Large area coatings; Properties; Pulsed magnetron sputtering; Structure; Titania

Indexed keywords

FFE; LARGE AREA COATINGS; PROPERTIES; PULSED MAGNETRON SPUTTERING; STRUCTURE; TITANIA;

COATINGS; GLASS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; OPTICAL MICROSCOPY; OPTICAL PROPERTIES; SCANNING ELECTRON MICROSCOPY; TITANIUM DIOXIDE; TITANIUM OXIDES; X RAY DIFFRACTION;

MAGNETRONS;

EID: 36049012063     PISSN: 16128850     EISSN: 16128869     Source Type: Journal    
DOI: 10.1002/ppap.200730804     Document Type: Conference Paper

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