The degradation prevention of resin materials for semiconductor manufacturing equipment by applying the ultra-high purity gas supply technology

Solid State Phenomena

Volumn 103-104, Issue , 2005, Pages 255-258

  Hidaka, Atsushi ^a   Yamashita, Satoru ^a   Tanahashi, Naoki ^a   Ishii, Hidekazu ^a   Kitano, Masafumi ^a   Shirai, Yasuyuki ^a   Ohmi, Tadahiro ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

Degradation prevention; Molding environment; Organic contaminants; Resin materials

Indexed keywords

CONTAMINATION; HYDROCARBON REFINING; MOLDING; MOLECULAR WEIGHT; SEMICONDUCTOR DEVICE MANUFACTURE;

DEGRADATION BEHAVIOR; DEGRADATION PREVENTION; ORGANIC CONTAMINANT; OXYGEN CONCENTRATIONS; RESIN MATERIALS; SEMICONDUCTOR EQUIPMENT; SEMICONDUCTOR MANUFACTURING; VOLATILE CONTAMINANTS;

RESINS;

EID: 36048995330     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.103-104.255     Document Type: Conference Paper

References (9)

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